Electrospray Coating (ESC) System

Overview

Toray Engineering proposes electronic spray coater (ESC)—cutting edge technology in coating—suitable for high-precision thin-film required in the process of organic EL (OLED) and other applications. Different from a conventional spray-coater using physical spraying, ESC, using charged droplets for coating, has high-efficiency of the functional liquid and easy maintenance of coater because of no adherence of the charged liquid on a mask.

Optimal arrangement of mask and nozzle materializes whole-area coating of high-precision thin-film, masked pattern-coating, and block coating. Substrate of A4 or less size can be coated by ESC. G5 size coater for demonstration is now available to perform sample-coating.

Features

Schematic view

Schematic view

With multiple nozzles and repeated scan

With multiple nozzles and repeated scan

Applications

OLED displays, OLED lighting, oriented films for LCDs, touch panels, solar cells, etc.

System specifications

Glass size Supports up to G5 (1100mm×1300mm)
Minimum mask dimension 5mm square (consult with us separately about specifications)
Viscosity A few hundred mPa·s or less
Coating thickness 20nm~1000nm
Coating thickness precision ±3~5%
Excluded region Less than 0.5mm
Side linearity Less than 50µm in range (σ=0.05)
Material utilization efficiency 95% or higher
Substrate types Glass, film, wafer, etc.

G5 size coating system

G5 size coating system

Please use this form to request information or make an inquiry regarding Electrospray Coating (ESC) System.


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Roll to Roll Pattern Coater
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