HS-830 Foreign Matter Inspection Device for FPDs

This Equipment is discontinued.

Overview

Like the HS-730, the first inspection device in the industry to offer sub-micron sensitivity, the HS-830 is infused with all the top-notch optical technology that we at Toray Engineering have to offer. This device enables you to detect foreign matter on glass substrate in a quarter of the time it used to take.

Features

Detection principle

Detection principle

Operating screen

Operating screen

Specifications

Model HS-830
Detection method Laser scattering imaging
Detection data Number and position of foreign objects on glass, chrome or ITO substrate; SML class; foreign matter map and histogram
Allowable substrate size & actual inspection time (in high-speed inspection mode; sensitivity: 1µm) 400 mm × 520 mm : 24 sec
600 mm × 720 mm : 41 sec
730 mm × 920 mm : 55 sec
1100 mm × 1300 mm : 86 sec
1600 mm × 1800 mm : 144 sec
Inspection sensitivity 0.3 µm (standard particle scattering substrate)
Spatial resolution 30 µm-square
Front/back separation capacity 20 µm(t=1.1 mm)
16 µm(t=0.7 mm)
Review function Standard feature

Optional extras

HS-830 is discontinued.
Please contact our CS Dept. at maintenance.
HS-830 Foreign Matter Inspection Device for FPDs
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Inquiry
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