HS-930 Foreign Matter Inspection Device for FPDs

Overview

"HS-930" uses our unique Optical technology, so "HS-930" has inspection speed of 130% compared with "HS-830" Series and judgement ability of front or back side particle.

Features

Specifications

Model HS-930
Detection method Laser scattering imaging
Inspection Sensitivity Standard Mode 1.0μm
High-Sensitivity Mode 0.3μm
(standard particle scattering substrate)
Spatial Resolution 30 µm-square
Scan Time Glass Size Standard Mode (1.0μm) High-Sensitivity Mode (0.3μm)
730 × 920 mm 43 sec 53 sec
1500 × 1850 mm 114 sec 141 sec
2200 × 2500 mm 195 sec 241 sec
2940 × 3370 mm 333 sec 410 sec
Judgement Ability of Front or Back Side Particle Sensitivity over 1:70 (t=0.3mm)

Optional

HS-830 is discontinued.
Please contact our CS Dept. at maintenance.
HS-830 Foreign Matter Inspection Device for FPDs
Inspection
HS-930 Foreign Matter Inspection Device for FPDs
HS-830 Foreign Matter Inspection Device for FPDs
Mura Checker for FPD MC Series
Inquiry
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