TWT Series Wafer Titlers

Overview

The TWT series is used exclusively for wafer ID marking, and can accurately mark even the most compact of areas.

Features

Specifications

Wafer size Maximum Φ300 mm
Tact time 120 sec. (exposure: 700 pts per wafer)
Dimensions (W × D × H) 1750 × 2600 × 2600 mm (Loading port, including FFU)
Weight 2,000 kg
TWT Series Dedicated Wafer Titlers
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TWT Series Wafer Titlers
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TRE, TLE Series Edge Exposure
Inquiry
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