Proximity Exposure System TE2500/TE2535 (Roll to Roll)

Features

Specifications

  TE2500 TE2535
Exposure Method Proximity Exposure
Exposure Area 260W × 280L [mm] 260W × 350L [mm]
Irradiation Method Parabolic Mirror
Light Source 5 kW Super-High Pressure Mercury Lamp(Air Cooling)
Wave Length 300-520 nm
Irradiance 55 mW/cm² 40 mW/cm²
Irradiance Uniformity Within ±5 %
Collimation Angle Under 1.5 °
Declination Angle Under 1.0 °
Resolution L/S = 10/10 µm
Alignment Method Automatic Alignment with Image Processing
Alignment Accuracy ±5 µm
Film Transfer Accuracy ±0.1 mm
Cycle Time 6 sec./cycle (Excluding Exposure Time)
Dimensions Approx. 4260W × 2100D × 2050H [mm]
Weight Approx.4,200 [kg]
Utility Requirement
Power 3-phase, AC200V, 10kVA
Compressed Air 0.4 MPa, 50 NL/min
Heat Exhaust 13 m³/min.

Peripheral Equipment

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Inquiry
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