High-irradiance Exposure System For PSR TE2500H/TE2535H (Roll to Roll)

Features

Specifications

  TE2500H TE2535H
Exposure Method Proximity Exposure
Exposure Area 260W × 280L [mm] 260W × 350L [mm]
Irradiation Method Parabolic Mirror
Light Source 5 kW Super-High Pressure Mercury Lamp (Air Cooling)
Wave Length 300-520 nm
Irradiance 100 mW/cm² 80 mW/cm²
Irradiance Uniformity Within ±5 %
Collimation Angle Under 2.3 °
Declination Angle Under 1.5 °
Resolution L/S = 20 / 20 µm
Alignment Method Automatic Alignment with Image Processing
Alignment Accuracy ±5 µm
Film Transfer Accuracy ±0.1mm
Cycle Time 6sec./cycle (Excluding Exposure Time)
Dimensions Approx. 4260W × 2100D × 2050H [mm]
Weight Approx. 4,200 [kg]
Utility Requirement
Power 3-phase, AC200 V, 10 kVA
Compressed Air 0.4 MPa, 50 NL/min.
Heat Exhaust 13 m³/min.

Peripheral Equipment

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