Proximity & Hard-Contact Exposure System TE2538 (Roll to Roll)

Features

Specifications

Exposure Method Proximity & Hard-contact Exposure
Exposure Area 260W × 380L [mm]
Irradiation Method Parabolic Mirror
Light Source 5 kW Super-High Pressure Mercury Lamp (Air Cooling)
Wave Length 300-520 nm
Irradiance 40 mW/cm²
Irradiance Uniformity Within ±5 %
Collimation Angle Under 1.5 °
Declimation Angle Under 1.0 °
Resolution L/S = 10/10 µm
Alignment Method Automatic Alignment with Image Processing
Alignment Accuracy ±5 µm (Proximity) / ±15 µm (Hard-contact)
Film Transfer Accuracy ±0.1 mm
Cycle Time Proximity mode : 6 sec./cycle (Excluding Exposure Time)
Hard-contact mode : 15 sec./cycle (Excluding Exposure Time)
Dimensions Approx. 4260W × 2100D × 2050H [mm]
Weight Approx. 4,200 [kg]
Utility Requirement
Power 3-phase, AC200V, 10 kVA
Compressed Air 0.4 MPa, 50 NL/min
Heat Exhaust 13 m³/min

Peripheral Equipment

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Inquiry
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