Organic Pattern Inspection System TB100/TB200

Features

Specifications

Inspection method 1. Fluorescent inspection
2. ITO visible inspection
3. White-light inspection (conventional method)
Inspection object size 300mm×300mm , t=10mm
Resolution 0.7µm / 1.4µm
Method of inspection Scan method by line camera
Scan width 2.8mm (Resolution 0.7µm) / 5.6mm(Resolution 1.4µm)
Scan speed 21.9mm/s (Resolution 0.7µm) / 43.8mm/s (Resolution 1.4µm)

Organic Pattern Inspection System TB100/TB200

TB100/TB200

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有機材料外観検査装置 TB100/TB200
Organic Pattern Inspection System
Organic Pattern Inspection System TB100/TB200
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