Luminescence Defect Inspection System "INSPECTRA® PL" Series

Photoluminescence (PL) is used to automatically inspect for crystal defects, cracks, and luminescence defects which cannot be detected with visible light surface inspection

Luminescence Defect Inspection System "INSPECTRA® PL" Series

Overview

This system uses luminescent images created using photoluminescence (PL) to perform high-speed, high-sensitivity automatic inspection for crystal defects, cracks, and luminescence defects which cannot be detected with conventional visible light surface inspection!

Features

  • Unique optical system and inspection algorithm are used for high-speed, high-sensitivity crystal defect detection and categorization.
  • Can be mounted as an optional peripheral to a wafer inspection system to not only perform crystal defect inspection during EPI processes, but to carry out integrated prototype and mass production inspection that covers everything up to pattern process surface inspection.
  • Visible light inspection and PL inspection can be combined to contribute to greater yield by identifying killer defects.

Specifications (PL)

  • GaN
  • SiC
  • Usage example

GaN use (LED, LD)

Inspection Sample LED Wafer,Chip
Pixel resolution 0.65um–
0.65um–
Inspection Time 4 minutes (4 inch wafer,5x,fastest)
Suport wafer size 8–2inch
8–2inch
Target Luminosity defects, light wavelength error, crystal defects, cracks, pattern surface defects, etc.
Option Wavelength estimation function

SiC use (power devices)

Inspection Sample SiC wafers, chips
Pixel resolution 0.65um~
0.65um~
Inspection Time 15 minutes (4 inch wafer, 5x, PL inspection)
Suport Wafer Size 8~2inch
8~2inch
Target defects Basal plane dislocation (BPD), stacking faults (SF) and other crystal defect, pattern surface defects, etc.

GaN use (power devices)

Inspection Sample GaN/sapphire, GaN/SiC, GaN/Si, GaN/GaN wafers and chips
Pixel resolution 0.65um~
0.65um~
Inspection Time 15 minutes (4 inch wafer, 5x, PL inspection)
Suport wafer sizes 8~2inch
8~2inch
Target Crystal defects, cracks, pattern surface defects, etc.

Inquiries

Technological Field
Technology >> Image processing > Exterior Inspection
Technology >> Image processing > Luminescence Defect Inspection
Industry Sector
Industry sector >> Semiconductors > Semiconductor inspection equipment