For Semiconductors, LCD, and Electronic Components

MS-500、LC-450A、LC-450D、LC-860

LC-450A

LC-860

MS-500

<MS-500>

Features

· Up to 8 points can be measured simultaneously
· A wide concentration display of 100% from ppm level is possible.
· Ideal for mounting in semiconductor manufacturing equipment, vacuum equipment, etc.
· Sensor is a direct insertion type (NW flange for vacuum 16/25/40)
· Provide special coating on high endurance sensor, further improve durability

LC-450A、LC-450D

Features

  • Measurement over a wide range of concentrations
    Can display concentrations ranging from the ppm level to 100%.
  • Improved sensor durability
    The oxygen sensor has been specially treated for improved durability.
  • AC wide range power
    AC 100 to 240 V (LC-450A)
    * The LC-450D uses DC 24 V power
  • Compact and easy to install
    Shorter depth than conventional devices. Takes little space.
  • RoHS compliant
  • CE marking declaration of conformity
    EN61010-1:2002 (Compliant), EN61326: +A3:2003

LC-860

  • Low concentration measurement
    Measurement from ppb-level to 100%
  • Easy to operate
    Separate keys for separate functions
  • Purge function
    Further stabilizes relative gas, making higher precision measurement possible (for models with purge function)
  • High reliability sensor
    Degradation prevention processing possible for sensor interior as well (optional)

MS-500_Specifications

Measurement principle Battery-powered zirconia oxygen analyzer
Type Separate-type (converter: wall-mounted; sensor: direct insertion type)
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range
Repeatability Within ±0.5% of full scale; range of 0-1% or more
Within ±1% of full scale or ±0.1ppm, whichever is larger; range of less than 0-1%
Concentrations in the range of 0-1ppm, atm are not under the warranty range
Number of measurement points 1-8
Sample gas requirements Pressure: 10-3-200KPa(absolute pressure)
Flow rate: 0.5-5,000mL/min or 0mL/min (measurement in state of natural dispersion)
Humidity: Dew point below ambient temperature
Temperature: 0-100℃
Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture
Reference gas Atmospheric air
Recorder output Transmission output only
Transmission output RS-232C
Alarm output None
Warmup time Under 6 min.
Dimensions MS-500 (controller): 92(W)×44(H)×120(D)mm (excludes protruding parts)
MS-510 (converter): 100(W)×40(H)×88(D)mm (excludes protruding parts)
Sensor unit:
SD16NW: Overall length 100mm (sensor Φ 11×39, body Φ 40×51)
SD25NW: Overall length 100mm (sensor Φ 11×42, body Φ 40×48)
SD40NW: Overall length 100mm (sensor Φ 11×41, body Φ 40×49)
Weight MS-500 (controller): Approx. 0.6 kg
MS-510 (converter): Approx. 0.5 kg
Sensor unit:
SD16NW: Approx. 0.2 kg
SD25NW: Approx. 0.2 kg
SD40NW: Approx. 0.35 kg
External connection Any of the vacuum flanges (NW16, 25 or 40)
Power 24VDC±10%

LD-450A_Specifications

Measurement principle Battery-powered zirconia oxygen analyzer
Type Desktop type / Panel mount type
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range
Repeatability Concentrations in the range ±1% of full scale and 0-1ppm, atm are not under the warranty range
Sampling system Continuous suction with internal pump
Sample gas requirements Pressure: Pressurization at 30KPa or less
Flow rate: 1,000-2,000mL/min
Humidity: Dew point below ambient temperature
Temperature: 0-100ºC
Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture
Reference gas Atmospheric air
Recorder output Oxygen level output: Switch between 4-20mA or 0-20mA (0-10V optional); insulated; load resistance of 550Ω or less
Recorder output range taken as full scale and oxygen concentration given in linear output Output range: 0-100% / 0-1000ppm / 0-100ppm / 0-10ppm
Automatic/fixed range
Transmission output RS-232C
Alarm output FAIL (device error): 1 point
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes with device error (contact point operation adjustable)
ALM (concentration alarm): 2 points (L/LL)
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes with alarm (contact point operation adjustable)
RDY (warmup signal): 1 point
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes during warmup (contact point operation adjustable)
* Minimum open/close capacity of the non-voltage contact point is 12V or 20mA or higher; unable to respond to tiny loads
MRK (range marker) output: 2 points
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Warmup time Under 5 min.
Dimensions Body: 210(W)×134(H)×300(D)mm (excludes protruding parts)
Weight Approx. 6kg
Gas connection INLET: Rc1/4
BYPASS OUT: Rc1/4
OUTLET: Rc1/4
Power 100-240VAC; 50VA (Normal: 35VA) 50Hz/60Hz

LD-450D_Specifications

Measurement principle Battery-powered zirconia oxygen analyzer
Type Desktop type / Panel mount type
Display system 4-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range
Repeatability Concentrations in the range ±1% of full scale and 0-1ppm, atm are not under the warranty range
Sampling system Continuous suction with internal pump
Sample gas requirements Pressure: Pressurization at 30KPa or less
Flow rate: 1,500L/min
Humidity: Dew point below ambient temperature
Temperature: 0-50ºC
Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture
Reference gas Atmospheric air
Recorder output Oxygen level output: 0-10VDC; insulated; load resistance of 600kΩ or more
(Option: 4-20mADC; insulated; load resistance of 550Ω or less)
Recorder output range taken as full scale and oxygen concentration given in linear output
Output range: 0-100% / 0-1000ppm / 0-100ppm / 0-10ppm; automatic/fixed range
Transmission output RS-232C
Alarm output FAIL (device error): 1 point
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes with device error (contact point operation adjustable)
ALM (concentration alarm): 2 points (L/LL)
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes with alarm (contact point operation adjustable)
RDY (warmup signal): 1 point
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Contact point closes during warmup (contact point operation adjustable)
* Minimum open/close capacity of the non-voltage contact point is 12V or 20mA or higher; unable to respond to tiny loads
MRK (range marker) output: 2 points
Non-voltage contact; contact capacity: 30VDC/AC or less, 0.5A or less
Warmup time Under 5 min.
Dimensions Body: 240(W)×134(H)×210(D)mm (excludes protruding parts)
Weight Approx. 5 kg
Gas connection INLET: Rc1/8
BYPASS OUT: Rc1/8
OUTLET: Rc1/8
Power 24VDC±10%, 1.25A (30VA at normal condition)

LC-860_Specifications

Measurement principle Battery-powered zirconia oxygen analyzer
Type Desktop type / Panel mount type
Display system 6-digit digital display (concentration display)
Measurement range 0-1 / 10 / 100 / 1000ppm / 1 / 10 / 100vol%O2; 10-20 to 10-0atm
Automatic range
Repeatability Within ±1% of full scale
xygen concentrations less than 1ppm and in the range 0-1ppm, atm are not under the warranty range
Sampling system Continuous suction with internal pump
Sample gas requirements Pressure: Pressurization at 30KPa or less
Flow rate: Up to 1,500mL/min
Humidity: Dew point below ambient temperature
Temperature: 0-50ºC
Others: Not to contain corrosive gas (fluorine gas, chlorine gas, sulfuric gas, etc.), gas containing organic silicone, flammable ingredients (including gas), oil or moisture
Reference gas Atmospheric air
Recorder output Oxygen level output: 4-20mA/0-10V
4-20mA: Insulated; load resistance of 600Ω or less
0-10V: Insulated; load resistance of 500Ω or more
Recorder output range taken as full scale and oxygen concentration given in linear output
Output range: 0-100% / 0-10% / 0-1% / 0-1000ppm / 0-100ppm / 0-10ppm / 0-1ppm / 10-20-10-0 or 4 optional automatic/fixed ranges
Transmission output RS-232C
Alarm output FAIL (device error): 1 point
Non-voltage contact; contact capacity: 24VDC/AC or less, 0.1A or less
Contact point closes with device error (contact point operation adjustable)
ALM (concentration alarm): 2 points
Non-voltage contact; contact capacity: 24VDC/AC or less, 0.1A or less
Contact point closes with alarm (contact point operation adjustable)
RDY (warmup signal): 1 point
Non-voltage contact; contact capacity: 24VDC/AC or less, 0.5A or less
Contact point closes during warmup (contact point operation adjustable)
* Minimum open/close capacity of the non-voltage contact point is 12V or higher; unable to respond to tiny load
MRK (range marker) output: 3 points
Non-voltage contact; contact capacity: 24VDC/AC or less, 0.1A or less
Warmup time Under 20 min.
Dimensions Body: 288(W)×144(H)×400(D)mm (excludes protruding parts)
Weight Approx. 10 kg
Gas connection INLET: Rc1/8
BYPASS OUT: Rc1/8
OUTLET: Rc1/4
Power 100-120VAC±10% 200VA 50Hz/60Hz

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Technological Field
Technology >> Measurement & analysis > Oxygen Analyzers
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