HS-930e Foreign Matter Inspection Device for FPDsParticle Inspection System for FPD.
Fast inspection of foreign matter on glass substrate with submicron sensitivity
Particle Inspection System
Overview
By adopting our original optical technology, we achieve an inspection speed of about 30% up (compared to HS-930)
Improved the front / back judging ability to thin substrates
Features
High speed and high sensitivity for foreign matter measurementis ia available
Example:114 sec for G6 Glass with standard sensitivity mode
• Combine the newly developed front / back determination optics with the conventional inspection principle to realize the front / back determination ability beyond HS - 930
Example: Over 1: 70 (t = 0.3 mm)
• A reviewing microscope make it possible to observe foreign matter and improves yield
• Available to from G2 to G10.5 glass size
Options
・Loader/Unloader
・AGV/MGV
・CIM
· Simultaneous front / back side inspection function
· Foreign matter map comparison function
Specification
| Model | HS-930 | ||
|---|---|---|---|
| Detection method | Laser scattering imaging method | ||
| Detection sensitivity | Standard sensitivity 1.0µm / high sensitivity 0.3µm (standard particle scattering substrate) | ||
| Spatial resolution | 30µm | ||
| Inspection time | Substrate Size | Standard Sensitivity(1.0µm)Mode | High Sensitivity(0.3µm)Mode |
| 730 × 920 mm | 43sec | 53sec | |
| 1500 x 1850mm | 114sec | 141sec | |
| 2200 x 2500mm | 195sec | 241sec | |
| 2940 x 3370mm | 333sec | 410sec*1 | |
| Ability to detect front / back | 1:70 or more (t = 0.3 mm) | ||
*1 With our standard 0.3 µm particle spraying