Inspection

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Wafer inspection system "INSPECTRA" series

Wafer inspection system "INSPECTRA" series

INSPECTRA series meet the requests of 100% automatic inspection with high speed and high spec. from front-end to back-end of semiconductor processing.


Chip Inspection System GEN3000T

Chip Inspection System GEN3000T

The GEN3000T is a chip inspection system which offers fully-automatic, stable defect inspections of diced semiconductor chips.


Surface Profiler measurement system "SP series"

Surface Profiler measurement system "SP series"

SP series, High accuracy 3D surface profiler measurement system with white light interferometry without contact, For semiconductor, thin film and optical tools to be measured by 3D at the level of "NANO".


Organic Pattern Inspection System  TB100/TB200

Organic Pattern Inspection System TB100/TB200NEW

TB100/TB200 is possible to perform a very good inspection, which was difficult by the conventional method, on the multi layer printed substrate of very small size or the appearance inspection of the transparent electrode such as ITO or organic residue in LED production process.
This is described in detail in the Fine Patterning section.


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Semiconductors
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